基于双通道参考校准方法的准光学太赫兹片上测量系统
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中国科学院紫金山天文台

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太赫兹探测,射电天文,国家自然科学基金项目(面上项目,重点项目,重大项目)


A quasi-optical terahertz on-chip measurement system based on a dual-channel reference calibration method
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Purple Mountain Observatory, Chinese Academy of Sciences

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    摘要:

    长期以来,在太赫兹波段进行片上器件特性的精确表征始终是一大难题。使用传统的接触式探针台存在测量重复性较差,信号损耗较大,信噪比较低的问题。而非接触式准光型探针台虽在一定程度上减少了损耗提高了可重复性,但对光路对准要求极为严格,并且受杂散光的限制,测量的动态范围通常较差。并且上述两种测试系统不易与低温制冷系统集成,限制了其在太赫兹天文接收器件中的应用。在本文中,我们提出了一种基于双路参考校准方法的准光型片上器件测量系统,通过准光馈入和片上集成双路探测器,结合精确的探测器光学接收功率的标定和有效的双通道串扰消除方法,可在一次测试中对耦合器、功分器等三端口器件的输出功率比实现精确的测量,引入特性已知的宽带耦合器后可进一步实现器件插入损耗的测量。在本文中,我们对该系统进行了详尽的基本性能表征和所用校准方法的验证,提供了对片上双槽天线、超导片上集成频谱仪等器件的实测案例,测试结果显示该系统性能指标良好,并且得到的器件特性与仿真结果吻合。

    Abstract:

    Accurate characterization of on-chip devices in the terahertz band has always been a major challenge. Conventional contact probe stages suffer from issues, such as poor repeatability, large signal loss, and low signal-to-noise ratio. The non-contact quasi-optical probe stage reduces the loss and improves the repeatability, but the optical alignment requirements are strict, and the dynamic range of the measurement is usually poor due to the influence of stray light. Moreover, the above two types of systems cannot be easily integrated with cryogenic cooling systems, which limits their application in terahertz astronomical instruments. In this paper, we propose a quasi-optical on-chip device measurement system based on a dual-channel reference method. By the quasi-optical feed and two integrated on-chip detectors, combined with an accurate calibration method of the detector optical received power and an effective dual-channel crosstalk elimination method, the output power ratio of the three-port devices such as coupler and power divider can be accurately obtained in a single measurement. To introduce a broadband coupler with known characteristics, the measurement can be extended to quantify the insertion loss of the device. In this paper, we performed a detailed characterization of the performance of the built system, validated the calibration method used, and provided several examples for measuring an on-chip twin-slot antenna and an on-chip superconducting spectrometer. The results demonstrate good system performance, and the obtained characteristics of these devices have a good agreement with the simulation.

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  • 收稿日期:2025-12-22
  • 最后修改日期:2026-03-28
  • 录用日期:2026-04-07
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