1中国科学院微电子研究所 高频高压器件与集成研发中心,北京 100029;2中国科学院大学,北京 100029
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1High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China;2University of Chinese Academy of Sciences, Beijing 100029, China
Supported by the National Natural Science Foundation of China (62234009)
何晓强,魏珂,张昇,张一川,郭嘉琦,王开宇,王建超,麻转利,陈晓娟,李彦奎.具有多周期渐变栅槽的高线性度AlGaN/GaN HEMT[J].红外与毫米波学报,2026,45(4):688-694. He Xiao-Qiang, Wei Ke, Zhang Sheng, Zhang Yi-Chuan, Guo Jia-Qi, Wang Kai-Yu, Wang Jian-Chao, Ma Zhuan-Li, Chen Xiao-Juan, Li Yan-Kui. High-linearity AlGaN/GaN HEMT with multi-cycle graded gate recess[J]. J. Infrared Millim. Waves,2026,45(4):688-694.
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