具有多周期渐变栅槽的高线性度AlGaN/GaN HEMT
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1中国科学院微电子研究所 高频高压器件与集成研发中心,北京 100029;2中国科学院大学,北京 100029

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O48

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High-linearity AlGaN/GaN HEMT with multi-cycle graded gate recess
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1High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China;2University of Chinese Academy of Sciences, Beijing 100029, China

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Supported by the National Natural Science Foundation of China (62234009)

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    摘要:

    本研究提出一种具有多周期渐变栅槽结构(MCGGR)的新型高线性度AlGaN/GaN高电子迁移率晶体管(HEMT)。该MCGGR-HEMT通过优化电子束光刻(EBL)光刻胶回流工艺,沿栅宽方向制备出多周期渐变势垒层而实现。制备的MCGGR-HEMT因其在栅宽方向周期性多阈值器件并联而成功实现跨导补偿,展现出3.5 V栅极电压摆幅,相较于常规器件的1.7 V栅极电压摆幅扩展了1.8 V。因其对2DEG沟道的连续渐变调制作用,使其高阶峰值跨导(Gm′和Gm")相较于常规器件分别降低37%和35%。MCGGR-HEMT在保证fT峰值的前提下,在更大的栅压范围内拥有更加平坦的fT曲线。在10 GHz的单音测量中(漏极偏压为30 V),功率密度为5 W/mm,PAE为49%。同频点双音连续波功率测量中(双音频率间隔为10 MHz,漏极偏压为30 V),该器件实现了38 dBm的第三阶交调输出截点(OIP3)、63.1 W/mm的OIP3/width、10 dB的线性度优值(OIP3/PDC)以及-57.7 dBc的第三阶互调失真(IMD3)。相较于常规器件,其性能分别提升5.2 dB、44 W/mm、4.8 dB和13.7 dB。该创新方案与常规AlGaN/GaN HEMT制备工艺高度兼容,提供了一条简化且经济高效的技术路径,为提升器件线性度开辟了新途径。

    Abstract:

    This work presents a novel high-linearity AlGaN/GaN high electron mobility transistor (HEMT) featuring a multi-cycle graded gate recess (MCGGR). The MCGGR-HEMT is realized through a designed periodically graded barrier layer along the gate width direction fabricated using optimized electron beam lithography (EBL) photoresist reflow process. The fabricated MCGGR-HEMT successfully achieves transconductance (Gm) compensation via the parallel connection of multiple periodic devices with graded threshold voltages along the gate width, exhibiting a recordable broadened gate voltage swing (GVS) of 3.5 V. This represents an extension of 1.8 V compared to the 1.7 V of conventional devices. Owing to its continuous graded modulation effect on the 2DEG channel, the higher-order peak transconductance values (Gm′ and Gm") are simultaneously reduced by 37% and 35%, respectively. Meanwhile, the MCGGR-HEMT demonstrates a flatter fT curve over a wider gate voltage range. At 10 GHz under single-tone continuous-wave (CW) over measurement (drain bias of 30 V), it achieves a power density of 5 W/mm and a power-added efficiency (PAE) of 49%. In two-tone CW power measurement at the same frequency (10 MHz tone spacing, drain bias of 30 V), the proposed device delivers a third-order output intercept point (OIP3) of 38 dBm, an OIP3/width of 63.1 W/mm, a linearity figure-of-merit (OIP3/PDC) of 10 dB, and a third-order intermodulation distortion (IMD3) of -57.7 dBc. These performance metrics represent improvements of 5.2 dB, 44 W/mm, 4.8 dB, and 13.7 dB, respectively, over the conventional device. This innovative technology is highly compatible with the conventional GaN HEMT fabrication processes, offering a simplified and cost-effective route for enhancing device linearity.

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何晓强,魏珂,张昇,张一川,郭嘉琦,王开宇,王建超,麻转利,陈晓娟,李彦奎.具有多周期渐变栅槽的高线性度AlGaN/GaN HEMT[J].红外与毫米波学报,2026,45(4):688-694. He Xiao-Qiang, Wei Ke, Zhang Sheng, Zhang Yi-Chuan, Guo Jia-Qi, Wang Kai-Yu, Wang Jian-Chao, Ma Zhuan-Li, Chen Xiao-Juan, Li Yan-Kui. High-linearity AlGaN/GaN HEMT with multi-cycle graded gate recess[J]. J. Infrared Millim. Waves,2026,45(4):688-694.

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  • 收稿日期:2025-11-13
  • 最后修改日期:2026-07-06
  • 录用日期:2025-12-11
  • 在线发布日期: 2026-06-30
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