1中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083;2中国科学院大学,北京 100049;3复旦大学 集成电路与微纳电子创新学院,上海 200433;4东华大学 机械工程学院,上海 201620;5中国人民解放军32215部队,北京 100093;6中国人民解放军32212部队,北京 100036;7昆明物理研究所,云南 昆明 650223;8复旦大学 光电研究院,上海 200438
E-mail:
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国家重点研发计划(2021YFA1200700),国家自然科学基金(62535018, 62431025, 62561160113)
1State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;2University of Chinese Academy of Sciences,Beijing 100049,China;3College of Integrated Circuits & Micro-Nano Electronics,Fudan University,Shanghai 200433,China;4College of Mechanical Engineering, Donghua University,Shanghai 201620,China;5Unit 32215 of PLA,Beijing 100093,China;6Unit 32212 of PLA,Beijing 100036,China;7Kunming Institute of Physics,Kunming 650223,China;8Institute of Optoelectronics, Fudan University,Shanghai 200438,China
Supported by the National key research and development program (2021YFA1200700), the National Natural Science Foundation of China (62535018, 62431025, 62561160113)
