一种基于3D打印透镜封装的宽带太赫兹准光探测器
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1北京理工大学 集成电路与电子 毫米波与太赫兹技术北京市重点实验室,北京 100081;2北京傲图科技有限公司,北京 100095

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TN454

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A broadband terahertz quasi-optical detector based on 3D-printed lens packaging
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1Beijing Key Laboratory of Millimeter Wave and Terahertz Technology, School of Integrated Circuiits and Electronics, Beijing Institute of Technology, Beijing 100081, China;2Beijing Altos Radar CO., LTD., Beijing 100095, China

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Supported by the Natural Science Foundation of China (61527805)

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    摘要:

    本文提出了一种基于3D打印透镜封装的宽带太赫兹(THz)准光探测器,可覆盖220 GHz和340 GHz两个典型大气窗口。该探测器由天线耦合探测芯片和3D打印透镜组成。芯片封装于多层介质层压基板上,肖特基二极管直接集成在片上天线的馈电端口。片上集成的宽带平面蝶形天线刻蚀在石英衬底上,工作频率范围为201 ~ 360 GHz,兼具辐射器与射频(RF)扼流功能。通过引入一对电容加载环(CLLs),在不增加天线尺寸的前提下实现了带宽拓展。此外,设计并集成了高阻抗折叠低频(LF)引线,以实现对高频信号泄漏的有效抑制。通过将轻量化、低成本的3D打印透镜与嵌入于多层介质层压结构中的金属化反射器相结合,实现了单向辐射特性并提升了整体结构的机械稳定性。该探测器在200 ~ 230 GHz范围内的最大电压响应率为2200 V/W,在320 ~ 350 GHz范围内的最大电压响应率为1885 V/W,实测辐射方向图与仿真结果表现出较好的一致性。

    Abstract:

    A broadband terahertz (THz) quasi-optical detector based on 3D-printed lens packaging has been presented, covering two typical atmospheric windows at 220 GHz and 340 GHz. The detector consists of an antenna-coupled detector chip and a 3D-printed lens. The chip was packaged on a multi-layer dielectric laminate, with a Schottky diode directly integrated across the feeding terminals of the on-chip antenna. The on-chip integrated broadband planar bowtie antenna was printed on a quartz substrate within the operation frequency range of 201-360 GHz, functioning as a radiator and a radio frequency (RF) choke. Bandwidth enhancement is achieved using a pair of capacitively loaded loops (CLLs) without increasing the antenna size. High-impedance folded low-frequency (LF) leads are incorporated to suppress high-frequency signal leakage. A lightweight, low-cost 3D-printed lens combined with an embedded metallized reflector enables unidirectional radiation and improved mechanical robustness. The detector achieves a maximum voltage responsivity of 2200 V/W over 200-230 GHz and 1885 V/W over 320-350 GHz. Measured radiation patterns agree well with simulations.

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历史
  • 收稿日期:2025-08-27
  • 最后修改日期:2026-03-30
  • 录用日期:2025-10-14
  • 在线发布日期: 2026-03-01
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