1中国科学院上海微系统与信息技术研究所 集成电路材料全国重点实验室,上海 200050;2中国科学院大学 材料与光电研究中心,北京 100049
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国家自然科学基金项目
1State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
the National Natural Science Foundation of China ( U2241227, 62435020, 12333012)
