基于侧栅AlGaN/GaN HEMT的共振探测太赫兹探测器
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1中国科学院半导体研究所 半导体集成技术工程研究中心,北京 100083;2中国科学院大学 材料科学与光电研究中心,北京 100049;3中国科学院大学 材料科学与光电技术学院,北京 100049;4中国科学院大学 电子电气与通信工程学院,北京 100049;5中国科学院大学 集成电路学院,北京 100049;6怀柔实验室,北京 101499

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TN386

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Terahertz detector based on side-gate AlGaN/GaN HEMT for resonant detection
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1Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3College of Materials Science and Opto-Electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China;4School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;5School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China;6Huairou Laboratory, Beijing 101499, China

Fund Project:

Supported by the Strategic Priority Research Program of Chinese Academy of Sciences (XDB43020502); CAS Project for Young Scientists in Basic Research (YSBR-064).

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    摘要:

    高电子迁移率晶体管(HEMT)太赫兹探测器由于栅宽过大,会导致沟道中产生杂散等离子体波模式,造成共振探测响应信号微弱,以及响应峰展宽。针对上述问题,提出一种侧栅HEMT(EdgeFET)结构。基于传统HEMT的二维电子气(2DEG)流体动力学方程,建立了侧栅器件的共振探测模型。制备了侧栅HEMT探测器,并在77 K下进行了太赫兹共振探测实验。实验结果表明:EdgeFET在77 K下展现出明显的共振响应,共振响应度可达到最大非共振响应度的3.7倍。实验数据与理论模型拟合良好,验证了模型的准确性。实验结果充分证实了侧栅HEMT在提升探测器共振性能方面的有效性,为开发下一代高性能太赫兹探测器提供了新的技术途径。

    Abstract:

    In high-electron-mobility transistor (HEMT) terahertz detectors, an excessively wide gate can generate oblique modes in the channel, resulting in weakened resonant detection signals and a broadened resonance peak. To address this issue, a side-gate HEMT (EdgeFET) structure was proposed. A resonant detection model for the side-gate device was established based on the hydrodynamic equations of the two-dimensional electron gas (2DEG) in conventional HEMT. A side-gate HEMT detector was fabricated, and terahertz resonant detection experiments were conducted at 77 K. The experimental results indicated that EdgeFET demonstrated distinct resonant responses at 77 K, with the resonant responsivity reaching 3.7 times the maximum non-resonant responsivity. The experimental data were fitted using the theoretical model to validate its accuracy. These results strongly confirm the effectiveness of EdgeFET in enhancing the resonant performance of the detector, providing a new technological approach for the development of next-generation high-performance terahertz detectors.

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  • 收稿日期:2025-03-26
  • 最后修改日期:2026-03-03
  • 录用日期:2025-04-28
  • 在线发布日期: 2026-03-01
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