1南京邮电大学 电子与光学工程学院,江苏 南京 210023;2南京邮电大学 信息材料与纳米技术研究院 柔性电子全国重点实验室,江苏 南京 210023;3中国科学院上海技术物理研究所 上海市光学薄膜与光谱调控重点实验室,上海200083;4复旦大学 光科学与工程系,上海 200433
TN29
国家自然科学基金(62275256)、2022东方英才计划青年项目、南京邮电大学自然科学基金(NY224106)、上海市光学薄膜与光谱调控重点实验室资助
1College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China;2State Key Laboratory of Flexible Electronics & Institute of Advanced Materials, Nanjing University of Posts and Telecommunications, Nanjing 210023, China;3Shanghai Key Laboratory of Optical Coatings and Spectral Modulation, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;4Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
Supported by the National Natural Science Foundation of China (62275256); the 2022 Eastern Talent Plan Youth Project; the Natural Science Foundation of Nanjing University of Posts and Telecommunications (NY224106); the Open Fund of Shanghai Key Laboratory of Optical Coatings and Spectral Modulation
胡二涛,刘嘉伟,邵鹏,辛颢,蔡清元,段微波,陈良尧.基于扫描成像的光电器件高分辨缺陷检测技术研究[J].红外与毫米波学报,2026,45(2):325-331. HU Er-Tao, LIU Jia-Wei, SHAO Peng, XIN Hao, CAI Qing-Yuan, DUAN Wei-Bo, CHEN Liang-Yao. High-resolution defect detection in optoelectronic device via scanning imaging technique[J]. J. Infrared Millim. Waves,2026,45(2):325-331.
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