弱电离区场增强的Ge基PIN结构阻挡杂质带红外探测器
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1中国科学院上海技术物理研究所 红外科学与技术全国重点实验室,上海 200083;2中国科学院大学,北京 100049;3.5上海科技大学 物质科学与技术学院,上海 201210;4.6上海大学 材料科学与工程学院,上海 200444;5.4国科大杭州高等研究院 物理与光电工程学院,浙江 杭州 310024;6.3华东师范大学 精密光谱科学与技术国家重点实验室,上海 200241

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TN215

基金项目:

国家重点研发计划(2023YFA1608701),国家自然科学基金(62274168、 11933006和U2141240)和杭州创新团队项目(TD2020002)


Field-enhanced Ge-based PIN structure blocked impurity band infrared detectors in weakly ionized regions
Author:
Affiliation:

1State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2University of Chinese Academy of Sciences, Beijing 100049, China;3.5School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China;4.6School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China;5.4College of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China;6.3State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China

Fund Project:

Supported by the National Key R&D Program of China (2023YFA1608701), the National Natural Science Foundation of China (62274168, 11933006 and U2141240), the Hangzhou Leading Innovation and Entrepreneurship Team (TD2020002)

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    摘要:

    本文研制了一种新型的锗(Ge)基阻挡杂质带(Blocked-Impurity-Band,BIB)红外探测器,采用平面型PIN结构,并利用近表面处理技术制备探测区和电极接触区。探测器展示了显著的整流特性,在反向偏压下具有极低的暗电流,且工作温度可提升至15 K。在该温度下,探测器在0 ~ -5 V反向偏置电压范围内,黑体探测率基本稳定在6 × 1012 cm·Hz1/2·W-1。通过能带结构分析,详细讨论了探测器的暗电流机理以及温度变化对光响应的影响,提出了基于低温弱电离区的工作原理。此外,还对探测器的黑体响应率、黑体探测率进行了系统测试,并揭示了探测器在更高工作温度下维持高性能的机制。本研究为Ge基BIB探测器的温度性能提升提供了创新的思路,并为未来红外探测器的设计和应用提供了理论依据和实验数据支持。

    Abstract:

    A novel germanium (Ge)-based Blocked-Impurity-band (BIB) infrared detector with a planar PIN structure was developed, using a near-surface processing technique to fabricate the target and electrode contact regions. The detector demonstrates significant rectifying characteristics, exhibiting extremely low dark current under reverse bias, and its working temperature is extended to 15 K. At this temperature, the detector maintains a stable detectivity of 6×1012 cm·Hz1/?·W?1 within the reverse bias voltage range of 0 V to -5 V. Through the band structure analysis, the dark current mechanism and the impact of temperature variation on optical response were discussed in detail, and the working principle based on the low-temperature weak ionization region was proposed. Additionally, tests of the detector’s blackbody response current and detectivity were systematically measured, and the mechanism of maintaining high performance at elevated working temperatures was clarified. The result provides innovative insights for enhancing the temperature performance of Ge-based BIB detectors and offers the theoretical and experimental support for the design and application of future infrared detectors.

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刘赤县,陈天业,王泽欣,胡清智,窦伟,刘晓艳,凌静威,潘昌翊,朱家旗,王鹏,邓惠勇,沈宏,戴宁.弱电离区场增强的Ge基PIN结构阻挡杂质带红外探测器[J].红外与毫米波学报,2026,45(2):227-235. LIU Chi-Xian, CHEN Tian-Ye, WANG Ze-Xin, HU Qing-Zhi, DOU Wei, LIU Xiao-Yan, LING Jing-Wei, PAN Chang-Yi, ZHU Jia-Qi, WANG Peng, DENG Hui-Yong, SHEN Hong, DAI Ning. Field-enhanced Ge-based PIN structure blocked impurity band infrared detectors in weakly ionized regions[J]. J. Infrared Millim. Waves,2026,45(2):227-235.

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  • 收稿日期:2025-01-20
  • 最后修改日期:2025-12-27
  • 录用日期:2025-03-24
  • 在线发布日期: 2026-03-10
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