对InAs复合沟道HEMT中跨导曲线异常偏移的峰分离和小信号模型分析
CSTR:
作者:
作者单位:

1中国科学院微电子研究所 高频高压器件与集成电路研究中心,北京 100029;2中国科学院大学,北京100049;3中国科学院半导体研究所,北京 100083;4东莞理工大学 国际微电子学院,广东 东莞 523808

作者简介:

通讯作者:

中图分类号:

TN385

基金项目:


Peak separation and small-signal modeling analysis of abnormal shift in the transconductance curve in InAs composite channel HEMT
Author:
Affiliation:

1High-Frequency High-Voltage Device and Integrated Circuits Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;2University of Chinese Academy of Sciences, Beijing 100049, China;3Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;4International School of Microelectronics, Dongguan University of Technology, Dongguan 523808,China

Fund Project:

Supported by the National Natural Science Foundation of China(62474195)

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    本研究成功制备了栅长为100 nm、具有InGaAs/InAs/InGaAs复合沟道的磷化铟基高电子迁移率晶体管(InP HEMTs)。直流测试表明,InAs沟道层的引入提升了跨导,但导致跨导峰值点在高漏压(Vds)偏置下向低栅压(Vgs)方向偏移。峰分离分析发现直流跨导曲线由两部分构成:栅压调控的本征跨导和碰撞电离诱导的附加跨导。进一步研究表明,该异常偏移源于沟道碰撞电离强度的变化,这种变化主要由栅漏电场改变引起,而非沟道载流子浓度的变化。小信号模型中引入的两个额外电流源表征碰撞电离跨导,其数值变化趋势与峰分离结果的一致性验证了机理的正确性。射频测试证实,尽管直流跨导有所提升,但碰撞电离跨导的时间常数远大于一般跨导的时间常数,器件射频特性未能得到有效改善。这些发现为抑制碰撞电离效应及提升有效跨导提供了理论基础。

    Abstract:

    In this work, 100 nm gate-length InP-based high electron mobility transistors (HEMTs) with a composite InGaAs/InAs/InGaAs channel are fabricated. DC measurements indicate that the InAs channel enhances transconductance but shifts the peak point toward lower Vgs under high Vds bias. Peak separation analysis reveals the DC transconductance curve is composed of two components: the gate-controlled transconductance and the impact-ionization-induced additional transconductance. Further analysis demonstrates that the anomalous shift originates from the channel impact ionization intensity variation, which is caused by changes in the gate-drain electric field rather than the carrier density in the channel. Two additional current sources are introduced in the small-signal model to characterize the impact-ionization-induced transconductance, and the numerical variation trends of their parameters are consistent with the peak separation results, which validate the mechanism''s correctness. RF measurements confirm that the DC transconductance enhancement does not effectively improve RF characteristics, which is attributed to the ionization-induced transconductance having a time constant significantly larger than that of conventional transconductance components. These findings provide a theoretical foundation for controlling the impact-ionization.

    参考文献
    相似文献
    引证文献
引用本文

巩永恒,陈宇轩,史劲元,张大勇,苏永波,丁武昌,丁芃,金智.对InAs复合沟道HEMT中跨导曲线异常偏移的峰分离和小信号模型分析[J].红外与毫米波学报,2026,45(2):272-281. GONG Yong-Heng, CHEN Yu-Xuan, SHI Jing-Yuan, ZHANG Da-Yong, SU Yong-Bo, DING Wu-Chang, DING Peng, JIN Zhi. Peak separation and small-signal modeling analysis of abnormal shift in the transconductance curve in InAs composite channel HEMT[J]. J. Infrared Millim. Waves,2026,45(2):272-281.

复制
分享
相关视频

文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2024-12-27
  • 最后修改日期:2026-03-12
  • 录用日期:2025-04-10
  • 在线发布日期: 2026-03-10
  • 出版日期:
文章二维码