3 in长波II类超晶格分子束外延工艺优化研究
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TN215

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Research on Optimization of Molecular Beam Epitaxy Process of Long-Wave Type-II Superlattice on 3-in Substrates
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    摘要:

    为提升大面阵II类超晶格红外探测器的性能、产量和材料质量,对3 in长波InAs/GaSb II类超晶格分子束外延(Molecular Beam Epitaxy, MBE)生长工艺优化进行了研究。结合反射式高能电子衍射(Reflection High-Energy Electron Diffraction, RHEED)条纹研究了不同的去氧化层温度和生长温度对3 in外延片质量的影响。使用光学显微镜、原子力显微镜(Atomic Force Microscopy, AFM)、表面颗粒检测仪、白光干涉仪、高分辨X射线衍射仪(High-Resolution X-Ray Diffractometer, HRXRD)以及X射线衍射谱模拟分别对外延片的表面形貌、均匀性和晶格质量进行了表征。优化后外延片1 μm以上缺陷的密度为316 cm-2,粗糙度为0.37 nm,总厚度偏差(Total Thickness Variation, TTV)为19.6 μm,77 K下截止波长为9.98 μm。在2 in长波II类超晶格分子束外延生长工艺的基础上,研究了增大GaSb衬底尺寸后相应生长条件的变化情况。这对尺寸增大后III-V族分子束外延工艺条件的调整具有参考意义,也为锑基II类超晶格红外探测器的面阵规模、质量和产能提升奠定了基础。

    Abstract:

    In order to improve the performance, output and material quality of the large area array type-II superlattice infrared detector, the optimal molecular beam epitaxy (MBE) growth condition of the long-wave InAs/GaSb type-II superlattice on 3-in GaSb substrate was studied. Combined with reflection high-energy electron diffraction (RHEED) fringes, the effects of different deoxidation temperature and growth temperature on the quality of 3-in epitaxial wafers were studied. The surface morphology, uniformity and lattice quality of the wafers were characterized by optical microscopy, atomic force microscopy (AFM), wafer defect inspection system, white light diffractometry, high-resolution X-ray diffractometer (HRXRD), and X-ray diffraction simulations. After optimization, the density of defects above 1 μm of the epitaxial wafer is 316 cm-2, the roughness is 0.37 nm, the total thickness variation (TTV) is 19.6 μm, and the cut-off wavelength at 77 K is 9.98 μm. Based on the molecular beam epitaxial growth process of 2-in long-wave type-II superlattice, the changes in the growth conditions after increasing the size of the GaSb substrate were studied. This is of reference significance for the adjustment of the conditions of III-V molecular beam epitaxy process after the size is increased. It also lays the foundation for the scale, quality and productivity improvement of the antimony-based type-II superlattice infrared detector array.

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胡雨农,邢伟荣,刘铭,等.3 in长波II类超晶格分子束外延工艺优化研究[J].红外,2021,42(11):1-8.

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  • 收稿日期:2021-07-01
  • 最后修改日期:2021-07-19
  • 录用日期:2021-07-26
  • 在线发布日期: 2021-11-30
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