基于甲烷热解的石英舟熏碳炉设计与实验
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TH112.1

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国家科技型中小企业技术创新基金项目(13C26215305429);云南省产业技术领军人才支持项目(YNWR-CYJS-2018-050)


Design and Experiment of Quartz Boat Carbon Fumigation Furnace Based on Methane Pyrolysis
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    摘要:

    制造红外探测器需使用碲锌镉等高纯度单晶材料。制备这类高纯度单晶体材料时,通常用区熔提纯法将原材料纯度由6N (99.9999%)提高到7N (99.99999%)。为了避免高温提纯环境下原材料与石英舟容器壁面粘连,先在石英舟壁面上形成一层厚度均匀、粘附性强的碳膜。针对石英舟表面用传统碳膜涂敷方法处理时存在涂层不均匀且杂质难于去除的问题,设计出一种在真空环境下将甲烷热解生成碳微粒,并将其粘附于石英舟壁面的熏碳炉。进行了加热温度与甲烷热解耗时计算以及加热控温性能与熏碳实验。结果表明,当加热温度在1000~1200 ℃之间时,甲烷热解25%耗时1.734~0.014 s,耗时短且容易实现碳膜粘接。当熏碳加热温度为1106 ℃时,熏碳区中部的控温精度为±0.1 ℃;在横向400~780 mm之间,石英管内腔温度大于等于1100 ℃。该熏碳炉的加热温度控制稳定性和熏碳性能较好,碳膜与石英舟之间的粘附性强,碳膜无污染且厚度均匀。

    Abstract:

    The manufacture of infrared detectors needs to use high-purity single crystal materials such as CdZnTe. When producing such high-purity single-crystal materials, zone melting purification methods are required to increase the purity of raw materials from 6N (99.9999%) to 7N (99.99999%). In order to prevent the adhesion of purified raw materials to the wall of the quartz boat vessel at high temperatures, it is necessary to form a carbon film with uniform thickness and strong adhesion on the surface of the quartz boat. The traditional method of coating carbon film method on the surface of the quartz boat has the problem of uneven coating and difficult removal of impurities. A carbon fumigation furnace based on methane pyrolysis in a vacuum environment with carbon particles adhering to the outer surface of the quartz boat was designed. The heating temperature and consuming time of methane decomposition were calculated. The heating temperature control performance and carbon fumigation experiments were carried out. When the heating temperature is between 1000 ℃ and 1200 ℃, 25% methane pyrolysis takes 1.734 s to 0.014 s, which is short and easy to achieve carbon film bonding. When the carbonization heating temperature is 1106 ℃, the temperature control accuracy in the middle of the carbonization zone is ±0.1 ℃. Between 400-780 mm in the transverse position of the furnace cavity, the temperature of the inner cavity of the quartz tube is greater than or equal to 1100 ℃. It′s heating temperature control stability and carbon fumigation performance are good, the adhesion between the carbon film and the quartz boat is good. The carbon film is pollution-free and the thickness is uniform.

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罗亚南,陈亦忻,郭关柱.基于甲烷热解的石英舟熏碳炉设计与实验[J].红外,2021,42(11):9-14.

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  • 收稿日期:2021-06-15
  • 最后修改日期:2021-06-27
  • 录用日期:2021-07-06
  • 在线发布日期: 2021-11-30
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