InAs/GaSb II类超晶格长波红外焦平面探测器研究
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Research on Long-Wavelength Infrared Focal Plane Array Detector Based on Type-II InAs/GaSb Superlattice
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    摘要:

    InAs/GaSb II类超晶格材料是第三代红外焦平面探测器的优选材料。报道了一种面阵规模为320×256、像元中心距为30 μm的InAs/GaSb II类超晶格长波红外焦平面器件。在77 K时,该器件的平均峰值探测率为7.6×1010 cm·Hz1/2·W-1,盲元率为1.46%,响应非均匀性为7.55%,噪声等效温差(Noise Equivalent Temperature Difference, NETD)为25.5 mK。经计算可知,这种器件的峰值量子效率为26.2%,50%截止波长为9.1 μm。最后对该器件进行了成像演示。结果表明,该研究为后续的相关器件研制奠定了基础。

    Abstract:

    InAs/GaSb type-II superlattice materials are the preferred materials for the third-generation infrared focal plane detectors. An InAs/GaSb type-II superlattice long-wavelength infrared focal plane device with array size of 320×256 and pixel pitch of 30 μm is reported. At 77 K, the average peak detectivity of the device is 7.6×1010 cm·Hz1/2·W-1, the blind element rate is 1.46%, the response non-uniformity is 7.55%, and the noise equivalent temperature difference (NETD) is 25.5 mK. The calculation shows that the peak quantum efficiency of this device is 26.2%, and the 50% cut-off wavelength is 9.1 μm. Finally, an imaging demonstration of the device is carried out. The results show that the research has laid the foundation for the subsequent development of related devices.

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温涛,邢伟荣,李海燕,等. InAs/GaSb II类超晶格长波红外焦平面探测器研究[J].红外,2021,42(5):1-6.

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  • 收稿日期:2020-11-16
  • 最后修改日期:2020-11-20
  • 录用日期:2020-11-26
  • 在线发布日期: 2021-06-02
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