As a new technology,the micro-opto-electromechanical systems (MOEMS) have been widely used in optical communication,optical display,data storage,optical sensing and etc..Compared with the traditional pressure sensors,the optical pressure sensor based on MOEMS has some unique advantages. In this paper,the structures,operation principles and fabrication processes of various MOEMS pressure sensors are described mainly.Finally,the structure and fabrication process of a MOEMS pressure sensor array is presented in brief.