SPECTRUM MODULATION RESEARCH OF A THIN-FILM FILTER WITH VISIBLE AND NEAR INFRARED DUAL BAND-PASS CHANEL
投稿时间:2020-01-19  修订日期:2020-09-21  download
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作者单位E-mail
陈刚 上海技术物理研究所 gangchen@mail.sitp.ac.cn 
刘定权 上海技术物理研究所 dqliu@mail.sitp.ac.cn 
Abstract:A remote sensing camera needs a thin-film filter with visible (wavelength 500~720 nm) and near infrared (wavelength 1064±1 nm) dual band-pass spectrum channels at any same geometric position. The spectrum and transparence of the two channels need be modulated accurately. JGS-1 fused quartz used as the substrate, and Ta2O5 and SiO2 thin film used as high (H) and low (L) reflective index layers respectively. 52 and 88 layers deposited on the two surfaces of substrate by dual ion beam sputtering method. The average transparence of 500~720 nm band reaches 92% and the peak transparence of 1064±1 nm band controlled in 26±1% range.
keywords:optical thin film  dual spectrum channel filter  ion beam sputtering deposition  spectrum modulation
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Copyright:《Journal of Infrared And Millimeter Waves》