An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector
Received:March 30, 2019  Revised:September 12, 2019  download
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Author NameAffiliationE-mail
LIU Chao Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100083, China
University of Chinese Academy of Sciences, Beijing 100029, PR China 
liuchao@ime.ac.cn 
HOU Ying Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100083, China
Wuxi Innovation Center for Internet of Things, Jangsu Wuxi, 214028 
 
FU Jian-Yu Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100083, China
University of Chinese Academy of Sciences, Beijing 100029, PR China
Wuxi Innovation Center for Internet of Things, Jangsu Wuxi, 214028 
fujianyu@ime.ac.cn 
LIU Rui-Wen Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100083, China  
WEI De-Bo Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100083, China
University of Chinese Academy of Sciences, Beijing 100029, PR China 
 
CHEN Da-Peng Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100083, China
University of Chinese Academy of Sciences, Beijing 100029, PR China
Wuxi Innovation Center for Internet of Things, Jangsu Wuxi, 214028 
 
Abstract:Thermal parameters of infrared thermal detector including: thermal capacity, thermal conductance and thermal response time, reflect the structure information and performance of detector. It is of great significance for device performance evaluation and optimization to accurately and efficiently measure these thermal parameters. The diode type infrared detector is an important type of infrared detector. Based on the self-heating effect of diode type infrared thermal detector, an electrical equivalent test method is developed. This method has the advantages of high precision and easy realization. A pixel of the self-made diode type infrared focal plane array is tested using this method, and the results are in good agreement with the theoretical analysis and verify the feasibility of the method.
keywords:infrared thermal detector, diode, electrical equivalent test, thermal parameters
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Copyright:《Journal of Infrared And Millimeter Waves》