(英)Ge薄膜在低温下的折射率研究
Received:June 24, 2017  Revised:September 01, 2017  点此下载全文
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Author NameAffiliationE-mail
XU Ling-Mao Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics xulm1990@163.com 
ZHOU Hui Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics zhouhui510@sina.com.cn 
ZHANG Kai-Feng Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics  
ZHENG Jun Science and Technology on Vacuum Technology and Physics Laboratory  
LI Kun Science and Technology on Vacuum Technology and Physics Laboratory  
WANG Ji-Zhou Wuxi Hongrui Aerospace Science and Technology Company Limited  
基金项目:国防基础科研项目
中文摘要:本文利用电子束蒸发方法在双面抛光的ZnSe基底上镀制单层Ge薄膜制成样品。在80K~300K温度范围内,采用PerkinElmer Frontier傅里叶变换红外光谱仪低温测试系统每20K测量一次Ge单层在2~15μm 波长范围的透射率。采用全光谱反演拟合方法得到Ge单层在2~12μm 波长范围内不同温度下的折射率。结果显示,在不同温度条件下,Ge单层折射率均随波长增大而减小,且变化趋势基本相同。符合Cauchy色散公式,利用Cauchy色散公式对折射率波长色散关系进行拟合。基于Cauchy公式运用拟合方法得到Ge薄膜材料折射率温度/波长色散表达式为:n(λ,T)=3.29669+0.00015T+5.96834×〖10〗^(-6) T^2+0.41698?λ^2 +0.17384?λ^4 。最后,通过该公式得到的设计值与实测光谱进行对比,验证了PbTe单层膜折射率温度/波长色散公式的准确性。
中文关键词:Ge膜,红外光学薄膜,折射率温度系数
 
Study on Refractive Index of Ge Film at Low Temperature
Abstract:Germanium (Ge) films with physical thickness of 1600nm was deposited on ZnSe substrates by an electron beam evaporation system. The transmittance of Ge film in the range of 2 to 15 μm was measured by a Perkin Elmer FTIR cryogenic testing system from 80K to 300K with a step length of 20 K. Then, the relationship between the refractive index and wavelength in the 2 -12 μm region at different temperatures was obtained by the full spectrum inversion method fitting. It can be seen that the relationship confirms to the Cauchy formula. The relationship between the refractive index of Ge film and the temperature / wavelength can be expressed asn(λ,T)=3.29669+0.00015T+5.96834×〖10〗^(-6) T^2+0.41698?λ^2 +0.17384?λ^4 , which was obtained by the fitting method based on the Cauchy formula. Finally, the accuracy of the formula was verified by comparing the theoretical value obtained by the formula with the measured result.
keywords:infrared film,Ge film,refractive index
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Copyright:《Journal of Infrared And Millimeter Waves》