基于反射差分显微术的有机薄膜空间均一性的研究
Received:December 30, 2016  Revised:April 12, 2017  点此下载全文
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Author NameAffiliationE-mail
HUO Shu-Chun State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University connie_wind@163.com 
HU Chun-Guang State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University cghu@tju.edu.cn 
SHEN Wan-Fu State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University  
LI Yan-Ning State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University  
HU Xiao-Tang State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University  
基金项目:国家重点研发计划项目(2016YFB1102203);优博论文作者专项资金资助项目(201140);国家自然科学基金(61008028);教育部留学回国人员科研启动基金资助项目
中文摘要:有机薄膜半导体器件在微电子和光电子领域具有重要的研究与应用价值,其成膜质量是影响器件性能的重要因素,如空间分布的均一性.采用反射差分显微测量方法,对各向异性基底上生长的并五苯薄膜的反射差分显微图像进行分析,研究了该薄膜参数空间分布的非均一性,同时展示了反射差分显微术在薄膜制备检测及工艺研究的应用价值.
中文关键词:反射差分显微术  各向异性  薄膜质量  偏振光学
 
Study on spatial uniformity of organic thin films based on reflectance difference microscopy
Abstract:Organic thin-film semiconductor devices have important research and application value in the fields of microelectronics and optoelectronics. The film quality is one of the key factors affecting the device performance such as the uniformity of film spatial distribution. This parameter was studied by analyzing the reflectance difference maps of pentacene thin film grown on an anisotropic substrate which were measured by reflectance difference microscopy. The results demonstrate the capability of reflectance difference microscopy to study the processing of thin film growth.
keywords:reflectance difference microscopy  anisotropy  film quality  polarization optics
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