(英)一种近方脊滤波器的设计与快速制造
Received:January 12, 2016  Revised:November 08, 2016  点此下载全文
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Author NameAffiliationE-mail
NAN Xue-Li The North University of China nanxueli@yeah.net 
ZHANG Bin-Zhen North University of China  
CUI Jian-Li North University of China  
YANG Xin North University of China  
GE Shao-Lei North University of China  
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目),山西省留学回国项目支持计划,山西省研究生创新项目
中文摘要:滤波器是信号传输系统中的重要组件。本文提出一中快速、高精度复制工艺方法,用于设计和制备WR-10波段矩形波导滤波器。采用多层匀胶单次紫外曝光工艺(硅片上匀SU-8胶),制备出的滤波器高度误差小于0.03%(3um),陡直度误差小于1.1o。实验结果表明,用该方法制备毫米波滤波器技术可行,并取得了卓越的电磁性能(关于:插入损耗,回波损耗和带宽)。最终测试结构可知,通带内的插入损耗测得结果小于0.5dB,几乎可以忽略不计,在整个通带内回拨损耗大于10 dB。结果表明,这种快速制造技术是制备太赫兹射频器件的一种有效办法,这种新技术将成为推动太赫兹射频器件未来发展的主要动力。
中文关键词:SU-8微加工  微波  滤波器  矩形波导  W波段
 
Facile design and rapid fabrication of a nearly-square ridge filter
Abstract:Filters are essential components of communication systems. A rapid and accurate fabrication method is presented in this paper for the design and fabrication of a waveguide filter. The filter was fabricated by using a multi-layer coating and one-time ultraviolet exposure lithography (SU-8 resist on a silicon wafer) to have dimensional fabrication errors of less than 3 μm in height and 1.1° in vertical angle deviation. We demonstrated the feasibility of the proposed class of filters and the fabrication method used and achieved a superior performance (with regard to: insertion loss, return loss, and bandwidth). Consequently the minimum passband insertion loss, which was practically negligible, was measured as being less than 0.5 dB while the return loss was greater than 10 dB during the passband, demonstrating that the chosen rapid fabrication technology was an effective method of terahertz device fabrication. The new technology should become a major driving force forging the future development of terahertz RF devices.
keywords:SU-8 micromachining,microwave,filter,RF MEMS, rectangular waveguide, W-band.
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Copyright:《Journal of Infrared And Millimeter Waves》