Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching

doi:10.11972/j.issn.1001-9014.2018.02.003

Home > Archive>Volume 37, Issue 2, 2018 >140-143. DOI:10.11972/j.issn.1001-9014.2018.02.003

Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching
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                        10.11972/j.issn.1001-9014.2018.02.003
                    
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Affiliation:School of Physics and Nuclear Energy Engineering,Beihang University,State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,School of Physics and Nuclear Energy Engineering,Beihang University,State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences
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Abstract:

GaSb-based laterally coupled distributed feedback (LC-DFB) quantum well lasers with a wavelength of 2 μm were successfully prepared. Second order Bragg gratings are fabricated by holographic lithography and inductively coupled plasma etching (ICP). The etching conditions for grating preparation are optimized and a single longitudinal mode lasing at room temperature is obtained. The room temperature peak power output per facet exceeds 5 mW with a maximum side-mode suppression ratio of more than 24 dB.

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LI Huan, YANG Cheng-Ao, XIE Shen-Wen, HUANG Shu-Shan, CHAI Xiao-Li, ZHANG Yu, WAGN Jin-Liang, NIU Zhi-Chuan. Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching[J]. Journal of Infrared and Millimeter Waves,2018,37(2):140~143

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Received:July 05,2017
Revised:August 28,2017
Adopted:September 04,2017
Online: May 03,2018
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