(英)全息光刻制备LC-DFB及光栅刻蚀优化
Received:July 05, 2017  Revised:August 28, 2017  点此下载全文
引用本文:李欢,杨成奥,谢圣文,黄书山,柴小力,张 宇,王金良,牛智川.(英)全息光刻制备LC-DFB及光栅刻蚀优化[J].Journal of Infrared and Millimeter Waves,2018,37(2):140~143
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Author NameAffiliationE-mail
LI Huan School of Physics and Nuclear Energy Engineering,Beihang University 13522013909@163.com 
YANG Cheng-Ao State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
XIE Shen-Wen State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
HUANG Shu-Shan State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
CHAI Xiao-Li State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
ZHANG Yu State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
WAGN Jin-Liang School of Physics and Nuclear Energy Engineering,Beihang University  
NIU Zhi-Chuan State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences zcniu@semi.ac.cn 
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目),国家重点基础研究发展计划(973计划)
中文摘要:成功制备出室温激射波长为2μm的GaSb基侧向耦合分布反馈半导体激光器。采用全息曝光及电感耦合等离子体刻蚀技术制备二阶布拉格光栅。优化了光栅制备的刻蚀条件,并获得室温2μm单纵模激射。激光器输出光功率超过5mW,最大边模抑制比达到24dB.
中文关键词:镓锑基  侧向耦合分布反馈  LC-DFB  全息光刻  二阶布拉格光栅
 
Laterally-coupled distributed feedback lasers fabricated with holographic lithography and Optimum etching grating
Abstract:We report on GaSb-based laterally coupled distributed-feedback (LC-DFB) diode lasers designed to operate at wavelength near 2 μm at room temperature. A second order Bragg grating was defined on the sides of the ridges by holographic lithography and etched by inductively coupled plasma (ICP). We optimized the etching conditions of grating and obtained emission wavelength around 2 μm in a single longitudinal mode at room temperature. The devices exhibit an output light power exceeds 5 mW with a maximum side mode suppression ratio of 24 dB in uncoated facets at room temperature.
keywords:GaSb-based, laterally  coupled distributed  feedback, LC-DFB, holographic  lithography, second  order Bragg  grating
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