Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching
Received:July 05, 2017  Revised:August 28, 2017  download
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Author NameAffiliationE-mail
LI Huan School of Physics and Nuclear Energy Engineering,Beihang University 13522013909@163.com 
YANG Cheng-Ao State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
XIE Shen-Wen State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
HUANG Shu-Shan State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
CHAI Xiao-Li State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
ZHANG Yu State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences  
WAGN Jin-Liang School of Physics and Nuclear Energy Engineering,Beihang University  
NIU Zhi-Chuan State Key Laboratory for Supperlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences zcniu@semi.ac.cn 
Abstract:GaSb-based laterally coupled distributed feedback (LC-DFB) quantum well lasers with a wavelength of 2 μm were successfully prepared. Second order Bragg gratings are fabricated by holographic lithography and inductively coupled plasma etching (ICP). The etching conditions for grating preparation are optimized and a single longitudinal mode lasing at room temperature is obtained. The room temperature peak power output per facet exceeds 5 mW with a maximum side-mode suppression ratio of more than 24 dB.
keywords:GaSb-based, laterally coupled distributed feedback( LC-DFB), holographic lithography, second order Bragg grating
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Copyright:《Journal of Infrared And Millimeter Waves》