使用椭偏光谱研究氮化铝薄膜在不同温度下的光学性质
Received:August 12, 2016  Revised:November 10, 2016  点此下载全文
引用本文:林书玉,吴峰,陈长清,梁毅,万玲玉,冯哲川.使用椭偏光谱研究氮化铝薄膜在不同温度下的光学性质[J].Journal of Infrared and Millimeter Waves,2017,36(3):276~280
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Author NameAffiliationE-mail
LIN Shu-Yu College of Physics Science DdDd Technology, Guangxi University, 745659272@qq.com 
WU Feng Huazhong University of Science and Technology wu_wufeng@126.com 
CHEN Chang-Qing Huazhong University of Science and Technology  
LIANG Yi College of Physics Science & Technology  
WAN Lin-Yu College of Physics Science & Technology  
FENG Zhe-Chuan College of Physics Science & Technology  
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)
中文摘要:通过椭偏仪对生长在蓝宝石上的不同厚度氮化铝薄膜的变温光学性质进行了研究, 并采用托克-洛伦兹模型对椭偏实验数据进行了拟合分析, 精确得到了氮化铝薄膜的厚度和光学常数(折射率n, 消光系数k)等.研究的结果表明: 相比薄的氮化铝薄膜, 厚的氮化铝薄膜的折射率较大.随着温度的升高, 氮化铝的折射率、消光系数和带隙会向低能端单调地移动(红移);厚度对带隙随温度改变的影响较小, 对折射率则有一定的影响.
中文关键词:氮化铝  椭偏仪  厚度  温度
 
Temperature-dependent optical properties of AlN films characterized by spectroscopic ellipsometry
Abstract:We investigated the optical properties of AlN films with different thicknesses grown on sapphire by spectroscopic ellipsometry at different temperature. Based on a Tauc-Lorentz dispersion model, thickness and optical constants (the refractive index n, the extinction coefficient k) of AlN films were extracted by fitting the experimental data. Our results show that the refractive index of thicker AlN film possesses bigger values. Similar to the previous report, it was also found that the refractive index, the extinction coefficient and band gap of AlN films shift monotonously to lower energies (a redshift) with temperature increasing. Moreover, with rising temperature, varying the thicknesses of the films exhibits little influence on the shrinkage of bandgap but slight influence on the changes of the refractive index.
keywords:AlN, Spectroscopic Ellipsometry, thickness, temperature
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