中红外硅微透镜阵列的离焦效应
Received:June 09, 2016  Revised:September 08, 2016  点此下载全文
引用本文:左海杰,杨文,张江勇,应磊莹,张保平,侯治锦,陈洪许,司俊杰.中红外硅微透镜阵列的离焦效应[J].Journal of Infrared and Millimeter Waves,2017,36(2):149~153
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Author NameAffiliationE-mail
ZUO Hai-Jie Department of Electronic Engineering, Xiamen University hjzuoo@126.com 
YANG Wen Department of Electronic Engineering, Xiamen University  
ZHANG Jiang-Yong Xiamen University, Laboratory of Micro/Nano Optoelectronics, Department of Electronic Engineering  
YING Lei-Ying Xiamen University, Laboratory of Micro/Nano Optoelectronics, Department of Electronic Engineering  
ZHANG Bao-Ping Xiamen University, Laboratory of Micro/Nano Optoelectronics, Department of Electronic Engineering bzhang@xmu.edu.cn 
HOU Zhi-Jin Luoyang Optoelectro Technology Development Center  
CHEN Hong-Xu Luoyang Optoelectro Technology Development Center  
SI Jun-Jie Luoyang Optoelectro Technology Development Center, Luoyang  
中文摘要:本文采用严格数值算法对中红外硅微透镜阵列进行了模拟,该微透镜阵列特征尺寸小于波长工作波长。研究发现该微透镜阵列存在一个显著的离焦效应,其离焦量达到0.4左右,超出了现有的传统理论模型预测范围。对微透镜阵列进行了制作和焦距测试,发现测试结果跟数值模拟基本吻合。微纳衍射光学集成系统中透镜离焦量是系统集成非常重要的一个参数,该研究结果为硅微透镜阵列和中红外探测器光学集成提供有效参考。
中文关键词:亚波长结构,FDTD,红外探测器,离焦,微透镜阵列
 
Focal shift of silicon microlen array in mid-infrared regime
Abstract:In this study rigorous numerical models were utilized to characterize the focal shift of the diffractive mid-infrared (MIR) silicon microlens array (MLA) with the critical size smaller than the working wavelength. We found a more pronounced focal shift in mid-infrared wavelength which is out of the range predicted by existing focal shift model. Focal properties of the MLA were also measured experimentally and shown to follow the simulation results. Our results provide a reference point in understanding the focal shift in MIR regime, which is important in terms of deciding the focal length of micro-nano lens systems, especially when dealing with the integration of diffractive devices in infrared optical system.
keywords:subwavelength structure  FDTD  infrared detector  focal shift  microlens array  
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