The laser beam induce current (LBIC) characterization on femtosecond laser drilled holes indicates the formation of pn junctions in p-HgCdTe. The influences of laser power and numerical values of focus lens on the morphology of the drilled holes were studied. The diameter of the holes and their inversion layer thickness are both linearly proportional to the power of laser. On the other hand, there were no observable changes in the LBIC signals of the holes as the laser power was changed. In addition, the LBIC signal intensity of the holes was insensitive to the change of focus depth of the drilling laser.
ZHOU Song-Min, ZHA Fang-Xing, GUO Qing-Tian, YIN Fei, LI Mao-Sen, MA Hong-Liang, ZHANG Bo. THE MORPHOLOGY OF MICRO HOLE PN JUNCTION IN P-TYPE HgCdTe FORMED BY FEMTOSECOND LASER DRILLING[J]. Journal of Infrared and Millimeter Waves,2010,29(5):337~341Copy