128×128 SW/MW two-color HgCdTe IRFPAs
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    Abstract:

    The results of 128×128 SW/MW twocolor HgCdTe infrared focal plane arrays (IRFPAs) were presented. By B+implantation, mesaisolation etching, sidewall passivation, sidewall metallization and flipchip hybridization with readout integrated circuit (ROIC),128×128 SW/MW twocolor HgCdTe IRFPAs detector was fabricated from a fourlayer ppPN heterojunction of Hg1-xCdxTe film grown by molecular beam epitaxy and insitu doping techniques. The micromesa fillfactor of (50×50)μm2 twocolor detector arrays was doubled by optimizing the wetchemical etching process. The staring SW/MW twocolor HgCdTe IRFPAs detector performed high uniformity and normal photoelectric properties. At liquid nitrogen temperature, the cutoff wavelengths of the twocolor IRFPAs were 2.7μm and 4.9μm, respectively, and the peak detectivities (D*λp) were 1.42×1011cmHz1/2/W and 2.15×1011cmHz1/2/W respectively. 

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YE Zhen-Hua, YIN Wen-Ting, HUANG Jian, HU Wei-Da, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li.128×128 SW/MW two-color HgCdTe IRFPAs[J]. Journal of Infrared and Millimeter Waves,2010,29(6):415~418

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History
  • Received:August 25,2009
  • Revised:May 31,2010
  • Adopted:September 03,2009
  • Online: November 22,2010
  • Published: