Structural design of mid-infrared waveguide detectors based on InAs/GaAsSb superlattice
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1.School of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China;2.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Clc Number:

TN304.2;TN305

Fund Project:

Supported by the National Natural Science Foundation of China(NSFC) (61904183, 61974152, 62104237, 62004205); the Youth Innovation Promotion Association of the Chinese Academy of Sciences(Y202057); Shanghai Science and Technology Committee Rising-Star Program(20QA1410500); Shanghai Sail Plans(21YF1455000).

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    Abstract:

    In the realm of near-infrared spectroscopy, the detection of molecules has been achieved using on-chip waveguides and resonators. In the mid-infrared band, the integration and sensitivity of chemical sensing chips are often constrained by the reliance on off-chip light sources and detectors. In this study, we demonstrate an InAs/GaAsSb superlattice mid-infrared waveguide integrated detector. The GaAsSb waveguide layer and the InAs/GaAsSb superlattice absorbing layer are connected through evanescent coupling, facilitating efficient and high-quality detection of mid-infrared light with minimal loss. We conducted a simulation to analyze the photoelectric characteristics of the device. Additionally, we investigated the factors that affect the integration of the InAs/GaAsSb superlattice photodetector and the GaAsSb waveguide. Optimal thicknesses and lengths for the absorption layer are determined. When the absorption layer has a thickness of 0.3 μm and a length of 50 μm, the noise equivalent power reaches its minimum value, and the quantum efficiency can achieve a value of 68.9%. The utilization of waveguide detectors constructed with III-V materials offers a more convenient means of integrating mid-infrared light sources and achieving photoelectric detection chips.

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PEI Jin-Di, CHAI Xu-Liang, WANG Yu-Peng, ZHOU Yi. Structural design of mid-infrared waveguide detectors based on InAs/GaAsSb superlattice[J]. Journal of Infrared and Millimeter Waves,2024,43(4):457~463

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History
  • Received:October 20,2023
  • Revised:June 15,2024
  • Adopted:December 01,2023
  • Online: June 13,2024
  • Published:
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