Study on material characterization and device performance of non-uniform GaAs/AlGaAs quantum well infrared detectors
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Affiliation:

1.School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China;2.State Key Laboratories of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Clc Number:

TN215

Fund Project:

Supported by the National Natural Science Foundation of China (12027805,61991444,11991060).

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    Abstract:

    In this paper, the GaAs/AlGaAs non-uniform quantum well infrared detector material was successfully grown by molecular beam epitaxy (MBE), and the microstructure was characterized in detail. The performance difference between the non-uniform quantum well structure and the conventional quantum well infrared detector is analyzed and compared, and the performance change of the non-uniform quantum well infrared detector under different well widths is comparatively studied. The microstructure of non-uniform quantum well infrared detector materials was analyzed by high resolution transmission electron microscopy (HRTEM) combined with energy dispersive spectroscopy (EDS), and the non-uniform well doping was characterized by secondary ion mass spectrometry (SIMS). The results show that the crystal quality of the non-uniform quantum well epitaxial material is very good, and the non-uniform quantum well structure and doping concentration are also in good agreement with the design values. The research results show that for non-uniform quantum well infrared detectors, the electric field distribution of the quantum well can be modulated by changing the doping concentration and barrier width of each well, and the dark current significantly decreases (by about an order of magnitude),compared with traditional uniform quantum well infrared detectors. Moreover, under different well widths, the transition modes of non-uniform quantum wells can change, and the devices with bound state to quasi-bound state transition modes (B-QB) have better blackbody response and lower dark current.

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SU Jia-Ping, ZHOU Xiao-Hao, TANG Zhou, FAN Liu-Yan, XIA Shun-Ji, CHEN Ping-Ping, CHEN Ze-Zhong. Study on material characterization and device performance of non-uniform GaAs/AlGaAs quantum well infrared detectors[J]. Journal of Infrared and Millimeter Waves,2024,43(1):7~14

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History
  • Received:March 27,2023
  • Revised:November 28,2023
  • Adopted:April 19,2023
  • Online: November 27,2023
  • Published:
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