Research on InAs/GaSb type-II superlattice dual-band long-/long-wavelength infrared photodetector
CSTR:
Author:
Affiliation:

1.North China Research Institute of Electro-optics, Beijing 100015, China;2.The State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China

Clc Number:

TN214

Fund Project:

Supported by the Equipment Model Development Project.

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    The development of type II superlattice dual-band long-/long-wavelength infrared focal plane photodetector is reported. Through the design of energy band structure and molecular beam epitaxial technology, dual-band long-/long-wavelength superlattice epitaxial material with good surface quality has been obtained. The 320×256 dual-band long-/long-wavelength InAs/GaSb superlattice focal plane photodetector with pixel center distance of 30 μm was prepared by breaking through the key technologies of low dark current passivation and low damage dry etching. The detector chip is interconnected with a dual color readout circuit, packaged in a Dewar package, and coupled to a refrigerator to form a detector assembly. The dual-band 50% cut-off wavelengths of the photodetector are 7.7 μm (band 1) and 10.0 μm (band 2), respectively. The average peak detectivity of band 1 reached 8.21×1010 cm·W-1·Hz1/2, and NETD achieved 28.8 mK. The average peak detectivity of band 2 reached 6.15×1010 cm·W-1·Hz1/2, and the NETD was 37.8 mK. Clear imaging of both colors has been achieved, demonstrating the realization of long-/long-wavelength dual-band photodetection.

    Reference
    Related
    Cited by
Get Citation

LIU Ming, YOU Cong-Ya, LI Jing-Feng, CHANG Fa-Ran, WEN Tao, LI Nong, ZHOU Peng, CHENG Yu, WANG Guo-Wei. Research on InAs/GaSb type-II superlattice dual-band long-/long-wavelength infrared photodetector[J]. Journal of Infrared and Millimeter Waves,2023,42(5):574~580

Copy
Share
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:March 22,2023
  • Revised:August 07,2023
  • Adopted:June 06,2023
  • Online: August 04,2023
  • Published:
Article QR Code