STUDY ON SUBSTRATE-LIFTED-OFF QUANTUM WELL INFRARED PHOTODETECTOR
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O469 O471.4
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Abstract:
Epitaxial films of GaAs/AlGaAs multi-quantum wells were lifted-off from its grown substrate and transferred to a Si substrate,a typical infrared optical window material.The lifted-off sample was fabricated into quantum well infrared photodetector(QWIP).The responsivity and photocurrent spectrum of the lifted-off QWIP is shown in similar to that of QWIP processed from the as-grown wafer.It demonstrates that the lift-off process can be used in QWIP process without device performance degradation.The lifted-off process can provide a new possibility to integrate the QWIP devices with other optical device to enhance the detector performance.
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ZHEN Hong-Lou, LI Ning, JIANG Jun, XU Wen-Lan, LU Wei, HUANG Qi, ZHOU Jun-Ming. STUDY ON SUBSTRATE-LIFTED-OFF QUANTUM WELL INFRARED PHOTODETECTOR[J]. Journal of Infrared and Millimeter Waves,2006,25(3):161~164