STUDY ON SUBSTRATE-LIFTED-OFF QUANTUM WELL INFRARED PHOTODETECTOR
DOI:
CSTR:
Author:
Affiliation:

Clc Number:

O469 O471.4

Fund Project:

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    Epitaxial films of GaAs/AlGaAs multi-quantum wells were lifted-off from its grown substrate and transferred to a Si substrate,a typical infrared optical window material.The lifted-off sample was fabricated into quantum well infrared photodetector(QWIP).The responsivity and photocurrent spectrum of the lifted-off QWIP is shown in similar to that of QWIP processed from the as-grown wafer.It demonstrates that the lift-off process can be used in QWIP process without device performance degradation.The lifted-off process can provide a new possibility to integrate the QWIP devices with other optical device to enhance the detector performance.

    Reference
    Related
    Cited by
Get Citation

ZHEN Hong-Lou, LI Ning, JIANG Jun, XU Wen-Lan, LU Wei, HUANG Qi, ZHOU Jun-Ming. STUDY ON SUBSTRATE-LIFTED-OFF QUANTUM WELL INFRARED PHOTODETECTOR[J]. Journal of Infrared and Millimeter Waves,2006,25(3):161~164

Copy
Share
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:August 12,2005
  • Revised:February 24,2006
  • Adopted:
  • Online:
  • Published:
Article QR Code