INFRARED MICROBOLOMETER OF LATERAL POLYSILICON p + p- n + JUNCTION BASED ON STANDARD CMOS PROCESSES

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INFRARED MICROBOLOMETER OF LATERAL POLYSILICON p + p- n + JUNCTION BASED ON STANDARD CMOS PROCESSES
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CHEN Er-Zhu, LIANG Ping-Zhi. INFRARED MICROBOLOMETER OF LATERAL POLYSILICON p + p- n + JUNCTION BASED ON STANDARD CMOS PROCESSES[J]. Journal of Infrared and Millimeter Waves,2005,24(3):227~230

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