MICRO/NANO-FABRICATION OF CONDENSED MATTERS BY NEAR INFRARED FEMTOSECOND LASER PULSES
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TN249 O469
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Abstract:
Near infrared femtosecond laser micro/nano-fabrication using in transparent condensed matters like glass and polymers was reported. Femtosecond laser induced refractive index change was used for fabrication of gratings and other elements inside silica glass. Drilling from rear surface in contact with water, microholes with large aspect ratio were machined in soda-lime glass; With the change of laser focus inside two-photon absorption polymer, straight and wavy lines are polymerized.
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LI Yan, GUO Heng-Chang, AN Ran, QI Feng-Jie, YANG Hong, JIANG Hong-Bing, GONG Qi-Huang. MICRO/NANO-FABRICATION OF CONDENSED MATTERS BY NEAR INFRARED FEMTOSECOND LASER PULSES[J]. Journal of Infrared and Millimeter Waves,2005,24(3):182~184