FABRICATION OF ARRAYED WAVEGUIDE GRATING BASED ON SOI MATERIAL

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FABRICATION OF ARRAYED WAVEGUIDE GRATING BASED ON SOI MATERIAL
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FANG Qing, LI Fang, LIU Yu-Liang. FABRICATION OF ARRAYED WAVEGUIDE GRATING BASED ON SOI MATERIAL[J]. Journal of Infrared and Millimeter Waves,2005,24(2):143~146

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