INFLUENCE OF DEPOSITION POWER ON THE COMPOSITION, STRUCTURE AND PROPERTIES OF PZT THIN FILMS PREPARED BY RF SPUTTERING

Home > Archive>Volume 23, Issue 4, 2004 >313-316

INFLUENCE OF DEPOSITION POWER ON THE COMPOSITION, STRUCTURE AND PROPERTIES OF PZT THIN FILMS PREPARED BY RF SPUTTERING
DOI:
                        
CSTR:
                        [cstr]
                    
Author:
                        
Affiliation:
Clc Number:TM215
Fund Project:

Article

Figures

Metrics

Reference

Cited by

Materials

Comments

Abstract:

Reference

Cited by

Get Citation

LI Xin-Xi, LAI Zhen-Quan, WANG Gen-Shui, SUN Jing-Lan ZHAO Qiang, CHU Jun-Hao . INFLUENCE OF DEPOSITION POWER ON THE COMPOSITION, STRUCTURE AND PROPERTIES OF PZT THIN FILMS PREPARED BY RF SPUTTERING[J]. Journal of Infrared and Millimeter Waves,2004,23(4):313~316

Copy

Article Metrics

Abstract:
PDF:
HTML:
Cited by:

History

Received:
Revised:April 28,2003
Adopted:
Online:
Published:

Home

Introduction

Editorial Board

Authors' Guidelines

Open Access

Publishing Ethics

Downloads

Copyright

Contact Us

中文版

Get Citation

Share

Article Metrics

History

Article QR Code