OPTICAL PROPERTIES OF PZT AMORPHOUS THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING
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HU Zhi-Gao, LAI Zhen-Quan, HUANG Zhi-Ming, WANG Gen-Shui SHI Fu-Wen, CHU Jun-Hao. OPTICAL PROPERTIES OF PZT AMORPHOUS THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING[J]. Journal of Infrared and Millimeter Waves,2004,23(3):181~184188