THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR
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TH744.1

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YOU Hai-Yang JIA Jian-Hu CHEN Jian-Ke HAN Tao NI Wei-Ming WANG Song-You LI Jin YANG Yue-Mei CHEN Liang-Yao. THE STUDY OF A AUTO ELLIPSOMETER SYSTEM BY USING A TWO-DIMENSIONAL CCD ARRAY DETECTOR[J]. Journal of Infrared and Millimeter Waves,2003,22(1):45~50

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  • Revised:August 11,2002
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