SIMULATED ANNEALING OPTIMIZATION ALGORITHM FOR INVERTING ELLIPSOMETRIC SPECTRA

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SIMULATED ANNEALING OPTIMIZATION ALGORITHM FOR INVERTING ELLIPSOMETRIC SPECTRA
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                        YANG Sheng-Hong,YU Zhao-Xian,LI Hui-Qiu,ZHANG Yue-Li,MO DangYANG Sheng-Hong,YU Zhao-Xian,LI Hui-Qiu,ZHANG Yue-Li,MO Dang

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Clc Number:O484.41 O484.5
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YANG Sheng-Hong, YU Zhao-Xian, LI Hui-Qiu, ZHANG Yue-Li, MO Dang. SIMULATED ANNEALING OPTIMIZATION ALGORITHM FOR INVERTING ELLIPSOMETRIC SPECTRA[J]. Journal of Infrared and Millimeter Waves,2000,19(5):338~342

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