SECONDARY ION MASS SPECTROMETRY CHARACTERIZATION OF ION-IMPLANTED ARSENIC DISTRIBUTION IN BULK HgCdTe
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ZHAO Jun, LU Hui-Qing, LI Xiang-Yang, FANG Jia-Xiong. SECONDARY ION MASS SPECTROMETRY CHARACTERIZATION OF ION-IMPLANTED ARSENIC DISTRIBUTION IN BULK HgCdTe[J]. Journal of Infrared and Millimeter Waves,2000,19(4):281~284