The masking and lifting-off method to combine the technology of manufacturing semiconductor devices with the PVD method to prepare the micro-infrared filter is introduced. Also the method of integrating the filters is introduced, The results of the research work are reported.
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Cheng Shiping, Zhang Fengshan, Yan Yixun. STUDY ON THE TECHNOLOGY OF PREPARING MICRO-INFRARED FILTER ARRAY BY MASKING AND LIFTING-OFF METHOD[J]. Journal of Infrared and Millimeter Waves,1994,13(2):109~112