STUDY ON THE TECHNOLOGY OF PREPARING MICRO-INFRARED FILTER ARRAY BY MASKING AND LIFTING-OFF METHOD
DOI:
CSTR:
Author:
Affiliation:

Clc Number:

TN214

Fund Project:

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    The masking and lifting-off method to combine the technology of manufacturing semiconductor devices with the PVD method to prepare the micro-infrared filter is introduced. Also the method of integrating the filters is introduced, The results of the research work are reported.

    Reference
    Related
    Cited by
Get Citation

Cheng Shiping, Zhang Fengshan, Yan Yixun. STUDY ON THE TECHNOLOGY OF PREPARING MICRO-INFRARED FILTER ARRAY BY MASKING AND LIFTING-OFF METHOD[J]. Journal of Infrared and Millimeter Waves,1994,13(2):109~112

Copy
Share
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:
  • Revised:
  • Adopted:
  • Online:
  • Published:
Article QR Code