INFRARED ABSORPTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY ION IMPLANTATION

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INFRARED ABSORPTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY ION IMPLANTATION
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FANG ZIWEI, YU YUEHUI, LIN CHENGLU, ZOU SHICHANG. INFRARED ABSORPTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY ION IMPLANTATION[J]. Journal of Infrared and Millimeter Waves,1991,10(2):113~119

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