Pd/Ti/Pt/Au alloyed ohmic contact for InAs/AlSb heterostructures with the undoped InAs cap layer
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School of Microelectronics, Xidian University and Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices,School of Microelectronics, Xidian University and Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices,State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences,State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences,School of Microelectronics, Xidian University and Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices,School of Microelectronics, Xidian University and Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices

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This work was supported by Advance Research Foundation of China (Grant No. 914xxx803- 051xxx111), National Defense Advance Research project (Grant No.315xxxxx301) and National Defense Innovation Program (Grant No.48xx4).

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    Abstract:

    In order to achieve lowcontact resistances of InAs/AlSb heterostructures with the undoped In As cap layer, Pd/Ti/Pt/Au alloyed ohmic contact has been investigated.The contact resistance Rcis evaluated by using transmission-line-model (TLM) measurements.A minimum of 0.128 Ω·mm has been obtained by using the optimal rapid thermal annealing (RTA) with the condition at temperature of 275 ℃ and annealing time of 20 s.The measurement from transmission electron microscopy (TEM) demonstrates that the Pd atoms diffuses into the semiconductor, which is beneficial to the formation of a high-quality ohmic contact during the rapid thermal annealing.This study shows that the contact resistance Rcis reduced significantly after Pd/Ti/Pt/Au alloyed ohmic contact, which is suitable for its application in InAs/AlSb heterostructures.

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ZHANG Jing, LYU Hong-Liang, NI Hai-Qiao, NIU Zhi-Chuan, ZHANG Yi-Men, ZHANG Yu-Ming. Pd/Ti/Pt/Au alloyed ohmic contact for InAs/AlSb heterostructures with the undoped InAs cap layer[J]. Journal of Infrared and Millimeter Waves,2018,37(6):679~682

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History
  • Received:January 19,2018
  • Revised:May 19,2018
  • Adopted:April 11,2018
  • Online: November 30,2018
  • Published: