Inspection of CdZnTe materials by infrared photo-thermal absorption imaging
Author:
Affiliation:

1.Key Laboratory of Infrared Image Materials and Devices,Shanghai Institute of Technical Physics of the Chinese Academy of Sciences,Shanghai;2.ZC Optoelectronic Technologies,Hefei,Anhui Province

Clc Number:

Fund Project:

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    Infrared photo-thermal absorption effect was used extensively in detecting the micro-defects in semiconductor materials (silicon wafers) as a nondestructive and noncontact technology. This effect was adopted initially to detect the structural characteristic of the defects in CdZnTe (CZT) crystal and images with obvious coherent fringes were obtained, which were investigated systemically. It was confirmed that the coherent fringes of the Infrared photo-thermal absorption images of CZT wafers come from the interference of incident light relative to parameters of incident light, wafer thickness, thermal conductivity and band gap of materials. Finally, the micro-defects of CZT materials and their distribution along depth direction were obtained by optimizing the test conditions.

    Reference
    Related
    Cited by
Get Citation

XU Chao, SUN Shi-Wen, YANG Jian-Rong, DONG Jing-Tao, ZHAO Jian-Hua. Inspection of CdZnTe materials by infrared photo-thermal absorption imaging[J]. Journal of Infrared and Millimeter Waves,2019,38(3):325~330

Copy
Share
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:January 11,2018
  • Revised:April 17,2018
  • Adopted:April 23,2018
  • Online: June 29,2019
  • Published: