60 nm T-shaped-gate InAlN/GaN HFETs with fT & fmax of 170 & 210 GHz
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National Key Laboratory of Application Specific Integrated Circuit(ASIC), Hebei Semiconductor Research Institute,National Key Laboratory of Application Specific Integrated Circuit(ASIC), Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute

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    Abstract:

    Scaled InAlN/GaN heterostructure field-effect transistors (HFETs) on sapphire substrate with high unity current gain cut-off frequency (fT) and maximum oscillation frequency (fmax) were fabricated and characterized. In the device, scaled source-to-drain distance (Lsd) of 600 nm was realized by employing nonalloyed regrown n+-GaN Ohmic contacts. Moreover, a 60-nm T-shaped gate was fabricated by self-aligned-gate technology. A high drain saturation current density (Ids) of 1.89 A/mm @ Vgs= 1 V and a peak extrinsic transconductance (gm) of 462 mS/mm were obtained in the scaled InAlN/GaN HFETs. In addition, from the small-signal RF measurements, the values of fT and fmax for the device with 60-nm gate were extrapolated to be 170 GHz and 210 GHz at the same bias. To our knowledge, they are the highest values of fT and fmax for the domestic InAlN/GaN HFETs.

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LV Yuan-Jie, FENG Zhi-Hong, ZHANG Zhi-Rong, SONG Xu-Bo, TAN Xin, GUO Hong-Yu, YIN Jia-Yun, FANG Yu-Long, CAI Shu-Jun.60 nm T-shaped-gate InAlN/GaN HFETs with fT & fmax of 170 & 210 GHz[J]. Journal of Infrared and Millimeter Waves,2016,35(6):641~645

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History
  • Received:January 02,2016
  • Revised:June 20,2016
  • Adopted:June 24,2016
  • Online: December 06,2016
  • Published: