Optical properties of VO2 nano periodic array

doi:10.11972/j.issn.1001-9014.2016.02.019

Home > Archive>Volume 35, Issue 2, 2016 >227-233. DOI:10.11972/j.issn.1001-9014.2016.02.019

Optical properties of VO2 nano periodic array
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                        10.11972/j.issn.1001-9014.2016.02.019
                    
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Affiliation:School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,Department of Computer and Information Engineering, Shanghai University of Electric Power,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology
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Abstract:

The optical properties of VO2 nano periodic array were studied in order to obtain low phase transition temperature and high quality optical material widely used in the field of intelligent window. Optical properties of VO2 nano periodic array at different filling ratios were calculated with finite difference time domain method, and the best VO2 nano periodic array was selected. Vanadium film was deposited on the glass substrate by magnetic DC sputtering, then VO2 film was formed by annealing under air condition, and VO2 nano periodic array was gained by photolithography and etching technology. Its microstructure and optical properties were tested by SEM, XRD and XPS as well as spectrophotometer. The results show that the phase transition temperature of VO2 nano periodic array with filling ratio 0.74 decrease about 25 ℃ and the transmittance has changed 39% between the metallic and semiconducting states at 1700 nm.VO2 nano periodic array exhibits the better optical properties than VO2 film before and after phase transition. It is indicated that the optical properties can be improved through regulating the structure of VO2 nano periodic array.

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TANG Jia-Yin, LI Yi, SUN Yao, LIU Fei, HAO Ru-Long, WU Zheng-Yi, JIANG Wei, XU Ting-Ting, CHEN Pei-Zu, FANG Bao-Ying, WANG Xiao-Hua, XIAO Han. Optical properties of VO2 nano periodic array[J]. Journal of Infrared and Millimeter Waves,2016,35(2):227~233

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Received:April 30,2015
Revised:December 18,2015
Adopted:June 18,2015
Online: May 11,2016
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