Simulation of the electrical properties of Al2O3/GaSb p-MOSFET
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Department of Applied Physics, Donghua University,National Lab for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences,Department of Applied Physics, Donghua University

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    Abstract:

    To study the high-field electrical property and the drain current Ion/Ioff ratio of Al2O3/GaSb p-MOSFET, the Poisson and continuity equations with carrier velocity saturation were solved consistently with two-dimensional numerical analysis. The simulation results show that a maximum drain current of 61.2 mA/mm has been reached for 0.75-μm-gate-length GaSb p-MOSFET device. The results have been compared with that of experiment. With change of the channel length and doping-level in substrate GaSb, the drain currents exhibit little change due to the effects of gate capacitance with high-k dielectric and low-threshold voltage. In addition, a high Ion/Ioff ratio with more than three orders of magnitude and relatively low pinch-off leakage current Ioff with 10-15 A/μm are predicted in an ideal condition. The results indicate that GaSb-based MOSFET with high-k dielectric is promising for future p-channel III-V device.

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GAN Kai-Xian, WANG Lin, XING Huai-Zhong. Simulation of the electrical properties of Al2O3/GaSb p-MOSFET[J]. Journal of Infrared and Millimeter Waves,2015,34(5):528~532

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History
  • Received:July 03,2014
  • Revised:September 10,2014
  • Adopted:September 15,2014
  • Online: November 30,2015
  • Published: