ZHANG Lei-Bo
National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of SciencesHOU Yun
National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of SciencesZHOU Wei
National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of SciencesHUANG Zhi-Ming
National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of SciencesCHU Jun-Hao
National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of SciencesNational Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences
The 2×8 element MnCoNiOdetector array was successfully fabricated with photolithography and wet-chemical etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8% K-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107V/W and detectivity of about 2×107cmHz1/2/W respectively at bias voltage of ±15V and chopping frequency of 10Hz. The response uniformity of the linear array bolometers is about 5.9%. Our results proved the feasibility of MnCoNiOfilms for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.
ZHANG Lei-Bo, HOU Yun, ZHOU Wei, HUANG Zhi-Ming, CHU Jun-Hao. Development of bolometer detector array made of Mn-Co-Ni-Othin films[J]. Journal of Infrared and Millimeter Waves,2014,33(4):359~363
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