High performance InP-based In0.52Al0.48As/In0.53Ga0.47As HEMTs with extrinsic transconductance of 1052 mS/mm
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Microelectronics Institute, Xidian University,Institute of Microelectronics, Chinese Academy of Sciences,Institute of Microelectronics, Chinese Academy of Sciences,Institute of Microelectronics, Chinese Academy of Sciences,Microelectronics Institute, Xidian University,Institute of Microelectronics, Chinese Academy of Sciences,Institute of Microelectronics, Chinese Academy of Sciences

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    Abstract:

    0.15 μm gate-length InP-based In0.52Al0.48As/In0.53Ga0.47As high electron mobility transistors (HEMTs) were successfully fabricated with gate-width of 2×50 μm and source-drain space of 2 μm. The maximum extrinsic transconductance (gmext) of 1 052 mS/mm was obtained under gate-source voltage (VGS) of 0.1 V and drain-source voltage (VDS) of 1.7 V at room temperature. Transmission Line Method (TLM) measurements revealed the contact resistance of 0.032 Ω·mm and the specific contact resistivity of 1.03×10-7 Ω·cm-2 on linear TLM patterns. Thus, markedly enhanced gmext was achieved by the superb Ohmic contact and the short source-drain space for minimizing series source resistance. These devices also demonstrated excellent RF characteristics. The fT and fmax extrapolated using the S-parameters measured from 100 MHz to 40 GHz were 151 GHz and 303 GHz, respectively. The HEMTs were promising for millimeter-wave band integrated circuits.

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ZHONG Ying- Hui, WANG Xian-Tai, SU Yong-Bo, CAO Yu-Xiong, ZHANG Yu-Ming, LIU Xin-Yu, JIN Zhi. High performance InP-based In0.52Al0.48As/In0.53Ga0.47As HEMTs with extrinsic transconductance of 1052 mS/mm[J]. Journal of Infrared and Millimeter Waves,2013,32(3):193~198

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History
  • Received:March 01,2012
  • Revised:April 26,2012
  • Adopted:April 28,2012
  • Online: June 14,2013
  • Published:
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