An improved test and analyze method for microbolometer thermal performances

Home > Archive>Volume 31, Issue 2, 2012 >183-187

An improved test and analyze method for microbolometer thermal performances
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Affiliation:State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China
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Abstract:

An improved test method was introduced. Compared with the traditional one, it could be more precision and impersonal. Nevertheless it is easy to implement and anti-influence of fabricated process. Through the test process with the microbolometers fabricated, this test method is reliable and precision.

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LIU Zi-Ji, LV Jian, ZHENG Xing, JIANG Ya-Dong, WANG Tao. An improved test and analyze method for microbolometer thermal performances[J]. Journal of Infrared and Millimeter Waves,2012,31(2):183~187

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Received:April 06,2011
Revised:December 12,2011
Adopted:May 16,2011
Online: April 23,2012
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