1kHz femtosecond laser was used to induce crystallization on amorphous Si film. Raman spectra show that the crystallization region depended critically on the laser fluence and profile. Furthermore, a textured surface with a mass of finegrained crystalline Si was observed through SEM. This structure might result from the explosive crystallization and epitaxial growth of Si nucleation on the interface of liquidsolid Si. Due to the simultaneous process of crystallization and surface texturing, this laser treated region enhanced its absorbance in the visible and infrared band.
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DAI Ye, HE Min, YAN Xiao-Na, MA GuoHong. Crystallization of amorphous silicon film induced by a near infrared femtosecond laser[J]. Journal of Infrared and Millimeter Waves,2011,30(3):202~205