Crystallization of amorphous silicon film induced by a near infrared femtosecond laser
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    Abstract:

    1kHz femtosecond laser was used to induce crystallization on amorphous Si film. Raman spectra show that the crystallization region depended critically on the laser fluence and profile. Furthermore, a textured surface with a mass of finegrained crystalline Si was observed through SEM. This structure might result from the explosive crystallization and epitaxial growth of Si nucleation on the interface of liquidsolid Si. Due to the simultaneous process of crystallization and surface texturing, this laser treated region enhanced its absorbance in the visible and infrared band.

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DAI Ye, HE Min, YAN Xiao-Na, MA GuoHong. Crystallization of amorphous silicon film induced by a near infrared femtosecond laser[J]. Journal of Infrared and Millimeter Waves,2011,30(3):202~205

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History
  • Received:August 30,2010
  • Revised:November 17,2010
  • Adopted:November 22,2010
  • Online: June 14,2011
  • Published:
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