940nmVCSEL高折射率对比度亚波长光栅反射镜的设计
投稿时间:2020-11-05  修订日期:2020-12-16  点此下载全文
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作者单位E-mail
罗妍 长春理工大学 luoyan0326@163.com 
郝永芹 长春理工大学 hyq72081220@aliyun. com 
晏长岭 长春理工大学  
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)
中文摘要:研究了一种940nm GaAs基VCSEL的高折射率对比度亚波长光栅反射镜(HCG),采用GaAs/AlOx光栅结构,讨论了TE偏振时光栅结构中各参数对反射光谱的作用规律,分析TE、TM不同偏振时反射镜的结构特点,及形貌误差对高反射带的影响。设计的TE-HCG的高反射带中心为940nm,在0.888~0.985μm波长范围内,TE波反射率大于99.5%,TM波反射率低于90%,高反射带宽97nm,Δλ/λ0>10%。该反射镜可以与VCSEL采用一次性外延生长技术制作,且具有结构简单,制作容差大,且偏振稳定的优势,不仅有利于改善器件性能,且大大降低VCSEL的制作难度和成本。
中文关键词:高折射率对比度  亚波长光栅  垂直腔面发射激光器  严格耦合波理论
 
Design of high refractive index contrast subwavelength grating reflector for 940nmVCSEL
Abstract:A high-refractive-index contrast subwavelength grating (HCG) for 940nm GaAs-based VCSEL is reported. The reflector is composed of GaAs and AlOx. The effects of the grating parameters of TE-HCG on refractivity are discussed in detail. And the structural characteristics of TE-HCG and TM-HCG are analyzed, especially the influence of their topography errors on the high reflection band. The 940nm TE-HCG has a large reflection bandwidth of up to 97nm with its reflectivity for TE incident light more than 99.5%, and the ratio of Ratio of high reflection band to central wavelength is more than 10%. But for TM incident light its reflectivity is less than 90%. It is worth mentioning that the VCSEL with such a TE-HCG can be prepared by one-time epitaxial growth technology, which helps to improve the performance of the device. Furthermore, it greatly reduce the manufacturing difficulty and cost of a VCSEL.
keywords:high-refractive-index contrast  subwavelength grating  vertical cavity surface emitting laser(VCSEL)  rigorous coupled wave analysis(RCWA)
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