512×2元 InGaAs光谱传感物联网节点研制
投稿时间:2020-10-27  修订日期:2021-01-01  点此下载全文
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作者单位E-mail
柯鹏瑜 中科院上海技术物理研究所 kepengyu@mail.sitp.ac.cn 
刘梦璇 中科院上海技术物理研究所  
王绪泉 中科院上海技术物理研究所  
黄松垒 中科院上海技术物理研究所 huangsl@mail.sitp.ac.cn 
张永刚 中科院上海技术物理研究所  
方家熊 中科院上海技术物理研究所  
基金项目:国家自然科学基金面上项目 (62075229),安徽省科技重大专项(S202003a06020001), 传感技术联合国家重点实验室开放课题(SKT1907),红外物理国家重点实验室开放课题(M201901)
中文摘要:基于512×2元 InGaAs光谱组件研制一款新型光谱传感物联网节点。针对中心距为25 μm的双列小像元探测器结构,在信号处理电路中对双通道数据进行均值处理,减小了单个光敏元响应异常对系统测试结果带来的影响。实验结果表明,此节点的测试波长范围为976-1700 nm,光谱分辨率达到13.5 nm,波长准确性优于3.2 nm,波长重复性优于0.3 nm,动态范围达到2300:1,吸光度重复性0.0011 AU,基线稳定性优于0.0001 A/h。采用多种标称酒精浓度的酒类样本对此光谱传感节点进行测试,验证其功能。
中文关键词:短波红外  分光滤光片;InGaAs探测器
 
Development of 512 × 2-element InGaAs spectral sensor IOT node
Abstract:Based on a 512 × 2-element InGaAs spectrum module, a new spectral-sensing IoT node is developed. The detector uses two parallel column structure with 25 um pixel pitch. In order to reduce the impact of an abnormal response of a single pixel, the data of two channels is averaging in the circuit. The experimental results show that the test wavelength range of this node is 976-1700 nm, and the spectral resolution is 13.5 nm. The wavelength accuracy is better than 3.2 nm, and the wavelength repeatability is better than 0.3 nm. The dynamic range is 2300:1, and the absorbance repeatability is 0.0011 AU. The baseline stability is better than 0.0001 A/h. The function of the sensor node was verified by using alcoholic beverages samples with different nominal concentrations.
keywords:short wave infrared,Spectral filter,InGaAs detector
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