(英)基于T形阳极GaAs SBD薄膜电路的664GHz次谐波混频器
投稿时间:2020-10-22  修订日期:2021-01-21  点此下载全文
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作者单位邮编
牛斌 南京电子器件研究所 210016
钱骏 南京电子器件研究所 
范道雨 南京电子器件研究所 
王元庆 南京电子器件研究所 
梅亮 南京电子器件研究所 
戴俊杰 南京电子器件研究所 
林罡 南京电子器件研究所 
陈堂胜 南京电子器件研究所 
基金项目:重点研发计划项目课题(No. 2018YFF0109301)
中文摘要:本文报道了用于冰云探测的基于0.5微米T形阳极砷化镓肖特基二极管薄膜集成电路工艺664GHz次谐波混频器。为降低器件寄生参数,提升太赫兹频段电路性能,设计并分析了了T形阳极GaAs SBD器件结构,开发了厚度仅5微米的薄膜电路工艺。混频器芯片组装成664GHz接收模块,经测试室温下664GHz最小双边带变频损耗达到9.9dB。
中文关键词:砷化镓肖特基二极管、薄膜、次谐波混频器
 
664 GHz Sub Harmonic Mixer Based on “T” Anode GaAs SBD Membrane Circuit
Abstract:—664GHz sub harmonic mixer for ice cloud detection was designed and fabricated, based on 0.5 μm “T” anode GaAs SBD membrane integrated process with thickness of 5μm. Parasitic parameters of “T” anode design were analyzed and membrane process was developed to improve high frequency performance. The mixer was characterized in 664GHz receiver setup. Double side band conversion loss of the mixer was 9.9dB at 664GHz room temperature.
keywords:GaAs SBD, membrane, sub harmonic mixer
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