脉冲激光沉积法制备的单层MoS2薄膜变温光响应研究
投稿时间:2020-08-02  修订日期:2020-09-08  点此下载全文
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作者单位E-mail
谢明章 华东师范大学 52161213017@stu.ecnu.edu.cn 
李留猛 华东师范大学  
李明 华东师范大学  
叶艳 华东师范大学  
张金中 华东师范大学  
姜凯 华东师范大学  
商丽燕 华东师范大学  
胡志高 华东师范大学 zghu@ee.ecnu.edu.cn 
褚君浩 华东师范大学  
基金项目:国家重点基础研究发展计划(973计划),国家自然科学基金项目(面上项目,重点项目,重大项目)
中文摘要:报导了在c-Al2O3衬底上用脉冲激光沉积法制备MoS2薄膜,并测试了其不同温度下的光响应。通过拉曼散射光谱和X射线衍射光谱证明了所制备的二硫化钼为纯2H相。通过X光电子能谱证明了所制备的二硫化钼硫钼原子比为1.92:1,在Mo元素的3d核心能级谱中存在红移和蓝移,说明薄膜中存在氧化和硫缺陷。此外,通过拉曼和光致发光分布图,证明了薄膜具有良好的均一性。在不同层数的二硫化钼样品中,单层二硫化钼样品具有最强的光响应,达到3 mAW?1。单层二硫化钼的变温光响应实验表明,在室温附近,温度升高会提高二硫化钼的光响应强度和响应时间。
中文关键词:二硫化钼  脉冲激光沉积  光致发光  光响应
 
Temperature-dependent photoresponse of monolayer MoS2 film grown by pulsed laser deposition
Abstract:We report the preparation and photoresponse of MoS2 films with different layers grown on c-Al2O3 by pulsed laser deposition (PLD). The phonon modes and crystallographic orientation discussed by Raman scattering and X-ray diffraction (XRD) prove that the MoS2 films are of pure 2H-phase. The S/Mo ratio of film is identified as 1.92:1 derived by X-ray photoelectron (XPS) experiments. The blue and red shifts of the Mo 3d peaks for XPS data indicate the existence of oxidation and sulfur defects in the films. Moreover, by Raman and photoluminescence (PL) mapping, the film thickness is proven to be uniform. The temperature-dependent photoresponse of monolayer MoS2 film indicates that the temperature plays an important role in the photoresponse intensity and response time. The present results can provide a reference for further improving the performance of MoS2-based photodetectors.
keywords:Molybdenum  disulfide, pulsed  laser deposition, photoluminescence, photoresponse
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